Data-Based Motion Control of Wafer Scanners
نویسندگان
چکیده
منابع مشابه
Wafer Stage Motion Control
Wafer manufacturing Industries uses conventional controller, but in order to control the position in sub nanometer range conventional controller is not suitable, why because Tuning and augmenting the controller becomes difficult and expensive. So a robust controller is designed for wafer manufacturing system. The controller design in this paper is performed for the translational x and y DOFs in...
متن کاملFpga-based Motion Controller for Wafer-handling Robot
This study applies FPGA (Field Programmable Gate Arrays) technology to implement a motion controller for wafer-handling robot which has three-DOF (Degree of Freedom) motion. The proposed FPGA-based motion controller has two modules. The first module is Nios II processor which is used to realize the motion trajectory computation and the three-axis position/speed controllers. The second module is...
متن کاملControl Relevant Identi cation and Robust Motion Control of a Wafer Stage
This chapter illustrates the identi cation of control-relevant models and the subsequent robust control design applied to a wafer stage. A wafer stage is part of a wafer stepper and used in chip manufacturing processes for accurate positioning of the silicon wafer on which the chips are to be produced. Accurate and fast positioning requires a robust and high-performance multivariable servo cont...
متن کاملConstructing Control Process for Wafer Defects Using Data Mining Technique
The wafer defects influence the yield of a wafer. The integrated circuits (IC) manufacturers usually use a Poisson distribution based c-chart to monitor the lot-to-lot wafer defects. As the wafer size increases, defects on wafer tend to cluster. When the c-chart is used, the clustered defects frequently cause erroneous results. The main objective of this study is to develop a hierarchical adapt...
متن کاملShape control in wafer-based aperiodic 3D nanostructures.
Controlled local fabrication of three-dimensional (3D) nanostructures is important to explore and enhance the function of single nanodevices, but is experimentally challenging. We present a scheme based on e-beam lithography (EBL) written seeds, and glancing angle deposition (GLAD) grown structures to create nanoscale objects with defined shapes but in aperiodic arrangements. By using a continu...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IFAC-PapersOnLine
سال: 2016
ISSN: 2405-8963
DOI: 10.1016/j.ifacol.2016.07.918